| Equipment: | ZygoLot, ZMI 501 |
| Applications: | |
| Properties: | XY Interferometric position measurement equipment with nm resolution |
| Tested materials: | |
| Category: | |
| Laboratory: | Lithuania - FTMC |
Interferometric position and displacement measurement
| Equipment: | ZygoLot, ZMI 501 |
| Applications: | |
| Properties: | XY Interferometric position measurement equipment with nm resolution |
| Tested materials: | |
| Category: | |
| Laboratory: | Lithuania - FTMC |