Name: | |
Equipment: | Spectra Physics Navigator X15SC |
Applications: | Laser annealing and crystallization. Laser ablation. Local laser doping. |
Properties: | 1064 nm. 7W@20kHz. Pulse duration: 20ns Pulse frequency: 15-100kHz Laser scanner. XYZ and rotation manual stage |
Tested materials: | c-Si, Thin films, Metals |
Category: | LASER SOURCES |
Laboratory: | Spain - UPM |

Specifications
Method | Min feature size | Working area | Process speed |
Laser Annealing | ~30µm spot diameter | Stage: 25x25x12.5mm Scanner Field size: 180mm |
~10m/s |