| Name: | |
| Equipment: | Spectra Physics Navigator X15SC |
| Applications: | Laser annealing and crystallization. Laser ablation. Local laser doping. |
| Properties: | 1064 nm. 7W@20kHz. Pulse duration: 20ns Pulse frequency: 15-100kHz Laser scanner. XYZ and rotation manual stage |
| Tested materials: | c-Si, Thin films, Metals |
| Category: | LASER SOURCES |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| Laser Annealing | ~30µm spot diameter | Stage: 25x25x12.5mm Scanner Field size: 180mm |
~10m/s |