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Sample (process results) analysis

Hub partner: FTMC

Additional information:

Optical microscopes
SEM, Surface profiler and AFM
Resistance measurement by two probes and four probes methods.

Equipement:

• Optical microscope Olympus BX51 with CCD camera
• Optical microscope Nikon Eclipse LV100 Nikon Eclipse LV100 with CCD camera
• Scanning electron microscope JEOL JSM-6490 LV with EDS/WDS
• Stylus profiler Dektak 150+
• AFM Veeco Dimension Edge
• Keithley 2600A System Source Meter

Contact: Paulius Gečys

Email: paulius.gecys@ftmc.lt

Competence category: Sample (process results) analysis