Hub partner: IOM
Additional information:
In-process measurement of electrical properties
Optical microscopy: bright light, dark light, stereo, interference, DIC, CCD, profiler
SEM with EDX
various AFM techniques
Metallographic cross sectioning, Cross beam workstation FIB/SEM
Raman Microscope
λexc:{632, 532, 457 nm}
XPS, XRD
Equipement:
• JenaVal
• Micromap
• ULTRA 55 with Quantax
• Bruker fast scan, Nanoscope
• AURIGA
• LabRam
Contact: Klaus Zimmer
Email: klaus.zimmer@iom-leipzig.de
Competence category: Sample (process results) analysis