| Name: | |
| Equipment: | Spectra Physics Milennia |
| Applications: | Thin film ablation, Surface texturing, Laser doping of crystalline solar cells, a-Si annealing and fast surface crystallization of amorphous thin film material, Metal sintering, Material heat treatment. |
| Properties: | DPSS Nd:YVO4 532 nm, CW 15 W, XYZ stages, Scanner |
| Tested materials: | Sintering metals and Ag pastes for photovoltaics applications. Amorphous thin film silicon crystallization. |
| Category: | LASER SOURCES |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| ps Ultrashort Pulse Laser Ablation | ~50 µm | Scanner: 10×10 cm Stages: 30 x30 cm |
Scanner: 3 mm/s-10 m/s Stages: up to 0.3 m/s at 0.1 µm resolution |