| Name: | |
| Equipment: | Spectra Physics Navigator X15SC |
| Applications: | Thin film ablation. Surface texturing. Laser annealing and crystallization. Laser ablation. Local laser doping. |
| Properties: | DPSS Nd:YAG 1064 nm. 7W@20kHz. Pulse duration: 20ns. Pulse frequency: 15-100kHz. Laser scanner. XYZ and rotation manual stage. |
| Tested materials: | c-Si, Thin films (metals, semiconductors, OCTs, etc.), Metals |
| Category: | LASER SOURCES |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| ps Ultrashort Pulse Laser Ablation | ~30µm spot diameter | Stage: 250x250x125mm Scanner Field size: 180mm |
10m/s |