| Name: | |
| Equipment: | Spectra Physics Navigator X15 |
| Applications: | Thin film ablation, Surface texturing, PV materials processing, LIFT processes, Thin film photovoltaic micromachining, Laser doping, Scribing of thin film solar cells, Laser firing processes, Material doping. |
| Properties: | DPPS Nd:YAG 1064 nm, 7 W@ 20 kHz, Pulse duration: 20 ns, Pulse frequency: 10-100 kHz, XYZ stages Scanner |
| Tested materials: | Scanner: 3 mm/s-10 m/s Stages: up to 0.3 m/s at 0.1 µm resolution |
| Category: | LASER SOURCES |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| ps Ultrashort Pulse Laser Ablation | ~20 µm | Scanner: 10×10 cm Stages: 30 x30 cm |
Scanner: 3 mm/s-10 m/s Stages: up to 0.3 m/s at 0.1 µm resolution |