| Name: | |
| Equipment: | Leica DCM 3D |
| Applications: | Surface texture characterization. Morphological study. Quality control of micro-structures. Characterization and morphological study of several laser processes such as laser scribing, laser fired contacts, local emitters. |
| Properties: | Interferometric and confocal microscope. Objectives from 5× up to 100× in confocal. |
| Tested materials: | |
| Category: | ANALYSIS AND CHARACTERIZATION |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| Optical | Optical Resolution (X / Y) 0.15 μm Vertical resolution confocal < 2 nm (with objective 100 X) Verical resolution -Interferometric: < 0.1 nm |
X-Y Stage: 114 × 75mm Vertical Scanning range: 40 mm |
Typical measurement time 3 – 5 seconds. Vertical Scanning speed (1 – 16μm/s with 100X) |