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Name:
Equipment: Leica DCM 3D
Applications: Surface texture characterization. Morphological study. Quality control of micro-structures. Characterization and morphological study of several laser processes such as laser scribing, laser fired contacts, local emitters.
Properties: Interferometric and confocal microscope. Objectives from 5× up to 100× in confocal.
Tested materials:
Category: ANALYSIS AND CHARACTERIZATION
Laboratory: Spain - UPM
No image available

Specifications

Method Min feature size Working area Process speed
Optical Optical Resolution (X / Y) 0.15 μm
Vertical resolution confocal < 2 nm (with objective 100 X)
Verical resolution -Interferometric: < 0.1 nm
X-Y Stage: 114 × 75mm
Vertical Scanning range: 40 mm
Typical measurement time 3 – 5 seconds. Vertical Scanning speed (1 – 16μm/s with 100X)