| Name: | |
| Equipment: | Renishaw inVia |
| Applications: | Surface texture characterization. Morphological study. Quality control of micro-structures. Characterization and morphological study of several laser processes such as laser scribing, laser fired contacts, local emitters. |
| Properties: | Interferometric and confocal microscope. Objectives from 5× up to 100× in confocal. |
| Tested materials: | |
| Category: | ANALYSIS AND CHARACTERIZATION |
| Laboratory: | Spain - UPM |
Specifications
| Method | Min feature size | Working area | Process speed |
| Optical | Ar ion laser (514.5nm). 5X, 20X, 50X, 100X objectives. Motorized XYZ Stage. Digital camera. Digital camera. 5X, 20X, 50X, 100X objectives. | Resolution XY: 1 μm | 110×60 mm |